Three Zones 1700℃ CVD Vacuum Tube Furnace

Model

TOB-G1700-80

Voltage

AC 380V

Heating power

13KW

Furnace tube material

Corundum tube

Number of furnace tubes

1

Furnace tube size

80*1300mm

Heating zone

900mm (three heating zone)

Constant temperature zone

600mm

Flange seal configuration

316 stainless steel water-cooled vacuum flange + sealing ring

Maximum operating temperature

1700℃

Long term operating temperature

≤1600℃

Heating element

Silicon molybdenum rod

Control accuracy

±1℃

Vacuum degree

Limit 6.67x10-4pa (cold)

Refractory material

The furnace lining is made of high-purity alumina fiber, vacuum formed fiber material and light hollow aluminum oxide plate. It has high service temperature, small heat storage capacity, rapid heat and cold resistance, no crack, no slag falling and good thermal insulation performance (the energy-saving effect is more than 80% of that of the old electric furnace). Double furnace structure, which not only has fast heating speed, but also has the characteristics of strong and durable, and no collapse in long-term use.

Thermal insulation material

Alumina multi fiber insulation material, the insulation layer is 170mm.

Shell

It is welded by steel plate and profile, and the shell is equipped with detachable protective plate, which adopts electrostatic spraying and paint baking. Fine workmanship and elegant appearance.

Energy saving performance

Light weight, fast temperature rise, energy saving more than 50%, time-saving and labor-saving.

Control mode

Control mode: full automatic control system, which can run automatically from room temperature to set temperature. The system is controlled by thyristor, and the temperature control system is modularized, with simple structure and convenient maintenance. It adopts Yudian or Dedian instrument, imported thyristor control, programmable 30 sections, multi-section power limiting function, multi group PID parameter self-tuning function, free setting of constant temperature and insulation curve, non-interference switching function, and the instrument has the function of temperature correction and compensation. Through the interconnection of software and computer, the functions of remote control, real-time tracking, history record, output report and so on of single or multiple furnaces can be realized. Paperless recording device can be installed to realize data storage and output. Overtemperature alarm and power off, leakage protection.

Instrument control

Yudian or Dedian instrument

Number of programmed curve segments

30 sections are adjustable, which can reduce unnecessary trouble caused by manual setting.

Temperature measuring element and temperature measuring range

Type B thermocouple, temperature measuring range: 0-1700℃

Heating rate

1 ℃/h to 10 ℃/min, adjustable

Digital display

Double display of measuring temperature and setting temperature, and the light column displays the heating power.

Control characteristics

Modular structure of control system, long-life design of key components of equipment, simple and reliable process, good stability and high precision.